2"-7"
Sapphire Substrates for semiconductor industry (ready-to-polish blanks)
2"-7" Sapphire Rodstocks for
semiconductor industry and optics
| 2"-7" Sapphire Substrates for semiconductor industry (ready-to-polish blanks) | |||||||
| Property | Specification | Item | |||||
| Material | Kyropulos single-crystal sapphire (99,996% of Al203), optical, colorless, resistant to annealing in air | ||||||
| Diameter | -"Standard", inch -"Customized", mm |
2" 50.8-53.0 |
3" 76.2-77.8 |
4" 100-103 |
5" 122-127 |
6" 150-156 |
7" 175-180 |
| Diameter accuracy, mm | 0.05 |
0.1 |
0.2 |
||||
| Center thickness, mm | -"Standard" -"Customized" |
0.48 0.42-0.7 |
0.6 0.5-0.8 |
0.8 0.6-1.0 |
1.2 0.7-1.5 |
1.2 0.7-1.5 |
1.5 1.0-2.0 |
| Thickness accuracy, mm | 0.02 |
0.025 |
0.03 |
0.04 |
0.05 |
||
| Orientation | -LED standard -LED mis-oriented -S-O-S -carrier for GaAs |
C-plane C-plane titled to M or A - - |
C-plane C-plane titled to M or A R-plane R-plane |
- - - R-plane |
|||
| Orientation accuracy | -"Standard" -"Customized" |
0.1° 0.05°-1° |
0.1° 0.1°-5° |
0.2° 0.1°-2° |
0.2° 0.1°-5° |
- - |
|
| Surface | -as cut -as ground -as lapped |
Sliced (Ra<5 micron) Fine ground (Ra<1 micron) Lapped (Ra<0.4 micron) |
|||||
| Primary flat length, mm | -"Standard" -"Customized" |
16.0+/-0.8mm Upon |
22.0 +/-1.0 mm customer |
32.5+/-2.0 mm request |
In
accordance with SEMI standard |
||
| Pimary flat orientation | -"Standard" -"Customized" |
A-plane +/-0.25° A-plane +/-0.2° |
A-plane +/-0.3° A-plane +/-0.2° |
A-plane +/-03° A-plane +/-0.32° |
In
accordance with SEMI standard |
||
| TTV, micron | -"Standard" -"Customized" |
<20 <15 |
<25 <20 |
<30 <20 |
<40 <30 |
<50 <35 |
<60 - |
| BOW, micron | -"Standard" -"Customized" |
<10 <5 (lapped) |
<15 <10(lapped) |
<30 <20(lapped) |
<35 <30 |
<40 <35 |
<50 - |
| WARP, micron | -"Standard" -"Customized" |
<25 <20 (lapped) |
<30 <20 (lapped) |
<40 <30 (lapped) |
- - |
- - |
- - |
| Bevel, mm | 0.15mm
x 45° |
0.2mm
x 45° |
|||||
Notes:
-other specifications,
size and tolerances are avilable
-customized
items with diameter up to 200mm are possible
| 2"-7" Sapphire Rodstocks for semiconductor industry and optics | |||||||
| Property | Specification | Item | |||||
| Material | Kyropulos single-crystal sapphire (99,996% of Al203), optical, colorless, resistant to annealing in air | ||||||
| Diameter | -"Standard", inch -"Customized", mm |
2" 50.8-53.0 |
3" 76.2-77.8 |
4" 100-103 |
5" 122-127 |
6" 150-156 |
7" 175-180 |
| Diameter accuracy, mm | 0.05 |
0.1 |
0.2 |
||||
| Lenght | 50-120 |
40-110 |
40-80 |
20-80 |
20-80 |
10-50 |
|
| Orientation | -LED standard -LED mis-oriented -S-O-S -carrier for GaAs -domes, windows |
C-plane C-plane titled to M or A - - Random or A/M/R-plane |
C-plane C-plane titled to M or A R-plane R-plane Random or A/M/R-plane |
- - - R-plane Random or R-plane |
|||
| Orientation accuracy | -"Standard" -"Customized" |
0.1° 0.05°-1° |
0.1° 0.1°-5° |
0.2° 0.1°-2° |
0.2° 0.1°-5° |
- - |
|
| Surface |
|
Fine ground (Ra<1 micron) |
|||||
| Primary flat length, mm | -"Standard" -"Customized" |
16.0+/-0.8mm Upon |
22.0 +/-1.0 mm customer |
32.5+/-2.0 mm request |
In
accordance with SEMI standard |
||
| Pimary flat orientation | -"Standard" -"Customized" |
A-plane +/-0.25° A-plane +/-0.2° |
A-plane +/-0.3° A-plane +/-0.2° |
A-plane +/-03° A-plane +/-0.32° |
In
accordance with SEMI standard |
||
Notes:
-other specifications,
size and tolerances are avilable
-special customer
requests about rod barrel parallelism and ends/barrel perpendicularity
a realizable
-customized
rods with diameters from 20mm to 170mm and length from 20mm to 150mm
are available
